Predictive statistical analysis of embedded meander resistors via measurement of canonical building blocks

A further developed passive device modeling methodology that accurately predicts the high frequency electrical behavior, and the statistical variation of embedded passive devices on a generic substrate, is presented. This methodology accurately models new passive devices by utilizing a small number of test structures to deembed the lumped element circuit values from canonical building blocks.; In essence, a nonlinear optimizer is used to find the optimal building block models, by fitting extensive high frequency measurements of the test structures behavior. This process is repeated on numerous fabricated test structures producing a relative variation in the lumped element circuit values of the building block models. A predicted range of operation for the actual modeled device is then generated using a MonteCarlo simulation tool, and the relative variations of the building block models.; Two sets of thirty-two test structures are fabricated by depositing gold on a 96% Alumina substrate, and s-parameter measurements taken. The Hspice Optimization tool uses these measurements to deembed the lumped element circuit values from the building block models; which are contained within the fabricated test structures. Relative variations of the deembedded element values are calculated and added to the device model circuit file, for simulation in the Hspice MonteCarlo tool. By means of comparison, between the range predicted by the MonteCarlo simulations and the actual measured data, the statistical variations of the component values were shown to provided an accurate representation of the overall passive device performance.; This method has been experimentally verified for a 9-segment meander resistor, by demonstrating that the variation in the complete equivalent circuit models, based only on the circuit building blocks, can be used to predict such variations in the actual fabricated device. An accurate statistical modeling of the same 9-segment meander resistor utilizing only one test structure to deembed building block equivalent circuits will also be successfully proven in this research.; To automate this research, Unix scripts were developed which act as interface between user and computer by; automatically, running the complete statistical analysis process.