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Aerosol deposition for optical and electroceramic applications

Posted on:1998-05-18Degree:Ph.DType:Dissertation
University:Brown UniversityCandidate:Wei, Chih-HungFull Text:PDF
GTID:1461390014974389Subject:Engineering
Abstract/Summary:
A new technique for the fabrication of substrates for optical planar waveguides, fiber optics, and thin films of electroceramic capacitors has been developed.; We dope multi-component elements (Si, Ge, B, Al, Na, Ga, Zn, P, and rare earths) into glass waveguide on the Si wafers. Pyrex (SiO{dollar}sb2{dollar}-B{dollar}rmsb2Osb3{dollar}-Al{dollar}rmsb2Osb3{dollar}-Na{dollar}sb2{dollar}O, n = 1.4696) based glasses are very promising candidates for rare-earth doped host, in particular Er, to improve their lasing performances. All efforts have indicated that multi-component glasses of low temperature up to 1050{dollar}spcirc{dollar}C compared to conventional sintering temperature from 1200-1300{dollar}spcirc{dollar}C and near-matched thermal expansion coefficient to Si wafer can be fabricated by this process.; The electric field enhanced aerosol deposition with MCVD process has successfully fabricated rare earth doped fiber lasers and amplifiers with sol-gel solution, aqueous solution and halide vapor phase with aqueous solution to produce efficiently aerosol precursors. The different solution preparations methods are promised to be applicable for all of different demands of fiber optics.; We have demonstrated a feasible method to easily synthesize thin film (10-100{dollar}mu{dollar}m thickness) of high purity and single phase of (BaSr)TiO{dollar}sb3{dollar} by aerosol combustion using liquid sol as a precursor. The capacitance and dielectric constant have been measured from some of samples.; The high ratio of the perovskite structure of {dollar}rm Pb(Mgsb{lcub}1/3{rcub}Nbsb{lcub}2/3{rcub})Osb3 and Pb(Mgsb{lcub}1/3{rcub}Nbsb{lcub}2/3{rcub})Osb3{dollar}-BaTiO{dollar}sb3{dollar} system on the Pt/Ti/SiO2/Si substrates by aerosol combustion using sol-gel solution can be achieved. It offers a valuable starting point for further research using the aerosol technique to develop PMN-BT system on the different conducting substrates.
Keywords/Search Tags:Aerosol, Substrates
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