The development of nickel-zinc microbatteries for use in autonomous micro devices

This dissertation describes microscopic nickel-zinc batteries that were built using microfabrication procedures similar to those used in the microelectronics industry. These batteries were designed for use with autonomous microsystems and are of particular interest for applications that involve remote sensing. It is envisioned that the batteries would be part of a hybrid micropower system that would also include a device for scavenging energy from the environment in order to recharge the batteries and provide for a long operational lifetime.; The development of the microfabrication procedure for these nickel-zinc microbatteries is described. The microfabrication process allows many batteries to be built at once on a common substrate, using batch type procedures. The microfabrication procedure that has been developed should enable the fabrication of batteries on the same substrate used for other components of a remote microsystem.; A mathematical model of the nickel-zinc microbattery was used to develop a cell design that would provide high power using a minimum substrate area. The optimized cells were capable of discharges in the range of 200 mA/cm 2, making it possible to extract around 4 mW from a cell occupying an area of 0.02 cm2.; The batteries have a typical footprint in the range of 0.02 cm 2 and a capacity of approximately 0.555 mWh/cm2. They have demonstrated a good cycle life when a duty cycle similar to that needed for a remote sensor was used. Over 2000 cycles have been demonstrated using such a duty cycle. The high rate performance, small size, and high power capability of these batteries should make them suitable for microsystem applications that require high power for short periods of time.