Advanced surface texture analysis for process diagnostics and functional correlation

Surface finish plays an important role in several engineering component's function. In fact, it is the dependence on function that provides engineers the incentive to measure surface finish. Surface finish measurements are also useful in providing an index of process stability. While it has been realized that surface finish can be used for functional correlation and process diagnostics, it is rarely done so in practice. Surface texture measurements are currently only used as a go-no go gage for tolerance compliance. Therefore, there is a need to assess current industrial practices and identify directions that will advance surface metrology to diagnostics and correlation applications. In order to effectively do so, several industrial applications are compiled where surface finish is important from a manufacturing or functional perspective. These applications are developed into case studies with each case study addressing a specific issue on functional correlation or process diagnostics. More broadly, the case studies address two general themes 1. The need for parameterization based on functional wavelength bandwidths and features 2. The need for cause-effect modeling in surface metrology. In most cases, the case studies require the development of novel analytical techniques or the customization of existing tools. In order to allow practicing engineers to experiment, there is a need for packaging the techniques developed into an advanced surface profile analysis system. The case studies developed are carefully assessed for tools requirements and analysis needs. A requirements specification is drawn and the advanced analysis system is developed. The design of the system, its features and vision of usage are presented.