| The development of strongly-guided InP/In1-x GaxAsyP 1-y based Mach-Zehnder optical modulators for 10Gb/s telecommunications is detailed. The modulators have insertion losses including coupling as low as 4.5dB, due to the incorporation of monolithically integrated optical mode spot-size converters (SSC's). The modulators are optimized to produce system performance that is independent of optical coupling alignment and for wavelength operation between 1525nm and 1565nm. A negatively chirped Mach-Zehnder modulator design is demonstrated, giving optimal dispersion-limited reach for 10Gb/s ON/OFF-keying modulation. It is shown that the optical system performance for this design can be determined from purely DC based optical measurements. A Mach-Zehnder modulator design invoking nearly no transient frequency shifts under intensity modulation is also presented, for the first time, using phase-shifter implementations based on the Quantum-Confined-Stark-Effect (QCSE).; The performance impact on the modulator from the higher-order vertical and lateral waveguide modes found in strongly-guided waveguides has been determined. The impact of these higher-order modes has been minimized using the design of the waveguide bends, MMI structures, and doping profiles. The fabrication process and optical design for the spot-size mode converters are also thoroughly explored. The SSC structures are based on butt-joined vertically tapered passive waveguide cores within laterally flared strongly-guided ridges, making them compatible with any strong-guiding waveguide structure. The flexibility of the SSC process is demonstrated by the superior performance it has also enabled in a 40Gb/s electro-absorption modulator. The presented electro-absorption modulator has 3.6dB fiber-to-fiber insertion loss, polarization dependent loss (PDL) of only 0.3dB over 15dB extinction, and low absolute chirp (|alpha H| < 0.6) over the full dynamic range. |
