| Details of the design, fabrication, and characterization of silicon-on-insulator (SOI) nanophotonic devices are presented. Shallow etched rectangular profile gratings are demonstrated to couple free space light into planar SOI waveguides with efficiencies exceeding 20%. Parabolic planar solid immersion mirror (PSIM) couplers are shown to inject light into SOI photonic crystal waveguides with efficiencies exceeding 99%. Wavelength dependent low-loss propagation through SOI photonic crystal waveguides is reported, and the incorporation of nonlinear materials is considered. |
