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Three dimensional imaging of helicon wave fields via magnetic induction probes

Posted on:2010-01-27Degree:Ph.DType:Dissertation
University:University of Illinois at Urbana-ChampaignCandidate:Reilly, Michael PFull Text:PDF
GTID:1444390002977829Subject:Engineering
Abstract/Summary:
The majority of data presented in this work is for a helicon plasma discharge driven at 13.56 MHz, 500 Watts input power, 900 Gauss applied magnetic field, 10 mTorr neutral Argon gas, and cylindrical plasma of 5 cm diameter approximately 50 cm long. High frequency magnetic induction probes were developed to measure helicon wave propagation using a new technique for frequency calibration through an impedance analyzer; up to 100 MHz. This work demonstrates magnetic field measurements in high frequency plasma are greatly simplified through this new frequency characterization method. Line-lengths and transmission-cable-types are readily identified as diagnostic limiting factors. The magnetic probe design enables the first 3-dimensional imaging of plasma waves through detailed radial and axial measurements. Strong agreement is obtained between the measured br, btheta, and bz radial profiles with the numerical solutions of helicon waves when a non-uniform radial density profile is considered. The axial helicon wavelength predicted by the non-uniform radial density theory also agrees with the measured wavelength when the full three dimensional wave is accurately analyzed. In some cases, the differences between the three dimensional wavelength and the numerically solved values are less than 35%. This is in contrast to the two dimensional wavelengths which can differ from the numerical values by greater than 100%. We show a complete visual representation of helicon waves through 3-d imaging which provides significantly more accurate analysis of the helicon wavelength.;This work also observed a density peak downstream from the antenna/source through axial density measurements with a RF compensated Langmuir probe (calibrated against a 90 GHz microwave interferometer). Here, the downstream density peak is explained in terms of a global energy balance modeled by an axially decaying electron temperature peaked at the source; Te → 3 - 7 eV. This model does not require an assumption of a RF plasma or additional heating by helicon wave absorption; rather the model demonstrates excellent agreement with the measured axial density profiles when radial losses are assumed to be less than 10%, which is reasonably attributed to the axially applied static magnetic field.;The new diagnostic methods developed in this work (both probe characterization and analysis of measured data) provide fundamental insight into laboratory helicon plasma. The methods and results derived here will supplement and aid the design of future helicon plasma sources.
Keywords/Search Tags:Helicon, Plasma, Three dimensional, Magnetic, Probe, Imaging, Field, Work
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