Kinematic analysis and design of a compliant microplatform

Our research addresses the kinematics and the design of a three-dimensional device at the micro level. The device is formed by three actuators that transmit the motion to a central platform. Techniques used to manufacture microelectromechanical systems (MEMS) have severe limitations and they cannot permit the construction of complex joints. To solve this problem compliant joints are used in this device to connect the platform and actuators. At the MEMS level they offer significant advantages compared to their counterparts at the macro level.; The device is able to provide complex motions that require an elaborate mathematical model for their description. Two kinematic issues are presented: the forward and reverse analyses. The forward formulation allows for the determination of the location of the moving platform given the position of the actuators, while the reverse analysis finds the location of the actuators for a desired position of the platform.; The models are based on a Newtonian approach and are subjected to several assumptions to simplify the formulation. The Newtonian approach is preferred because it relates in a natural way the forces and the geometry of the device. Examples and verifications of the models are provided.; Actuators consist of two beams with different thermal expansion coefficients and a resistor between them. This configuration allows for the bending of the beam when temperature increases. Springs are formed of a compliant and photodefinable material. Issues associated with the selection of dimensions and materials as well as the manufacturing process that permits to build the device are presented.; The combination of compliant beams and compliant joints exhibits important advantages at the MEMS level and also poses challenging kinematic problems. The principles presented here will be useful for the generation of more complex devices.