| With the rapid development of chip and biotechnology,higher cleanliness and constant temperature requirements are put forward for the working space of semiconductor processing and biological experiment.In the dust-free operation space,the dedusting and temperature control equipments are continuous high cost operation,and actually most of the transmission systems used at present are manipulator,AGV,dustproof transmission equipment and other mechanical devices,which inevitably generate oil pollution and metal dust.Permanent magnetic suspension technology has the advantages of non-contact,no lubrication,low energy consumption,low heat,etc,which can effectively solve the problems of friction,oil pollution,dust,and it provides a practical and feasible technical means for the realization of ideal dust free transmission equipment.Based on the technical advantages of permanent magnetic suspension and non-contact permanent magnetic transmission,a new type of energy-saving transmission system using permanent magnetic suspension is proposed in this paper.The system adopts permanent magnetic control of variable magnetic circuit to realize the non-contact support and adopts the permanent magnet linear drive mode to realize the non-contact forward drive of the transmission device.First,based on the controllable magnetic circuit permanent magnet suspension structure,the realization mechanism of permanent magnetic suspension is clarified.Based on non-contact forward drive structure,the realization mechanism of permanent magnet induced linear drive is clarified.Second,the mathematical models of single-degree-of-freedom permanent magnetic suspension supporting mechanism and permanent magnetic suspension vehicle are established;and the mechanical characteristics of the suspension supporting mechanism and the effects of structural parameters on the mechanical performance are analyzed deeply combined with the finite element model and the verification experiment.The single tooth mechanical model,the whole tooth mechanical model and the torque model of the permanent magnet driving wheel are established.Third,the LQR controller,the robust controller and the anti-adsorption and anti-dropping controller are designed respectively,and the control characteristics of the suspension supporting mechanism are studied by simulation and experiment;the series controller is designed and the suspension characteristics simulation analysis of the permanent magnet suspension vehicle is carried out;the mathematical model of the permanent magnet non-contact linear drive device is builed,and the static characteristics of the permanent magnetic non-contact linear driving system are clarified by combining finite element analysis and experimental verification,and the dynamic characteristics and driving stability of the linear driving system are investigated.Finally,based on the realization mechanism and mathematical model of the system,the energy-saving characteristics are analyzed,the equivalent electromagnetic levitation experimental device is designed,and the comparison experiment of energy consumption is carried out to verify the energy-saving characteristics of the permanent magnetic suspension transmission system.In this paper,the research results will provide a new kind of non-contact transmission technology for the field of dust-free transmission,which can realize the energy saving operation;reduce the power consumption of the transmission system and heating rate of equipment;through dust-free operation,reduce the dust amount;decrease the running time of temperature control and dust removal equipments;realize energy conservation and environmental protection of the constant temperature dust-free working space.It will play an important role in promoting the rapid development of chip and biotechnology in our country. |
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