A Study On Film Bulk Acoustic Resonators And Their Applications In Intracellular Delivery

Intracellular delivery is a one of the most important methods for the study of new dosage and new preparation in modern pharmaceutics,which can be used to evaluate drug toxicy by making drug molecules into cells and further monitoring the viability and the mophorlogy of the cells.Intracellular delivery technique has been successfully utilized in the applications of skin medication and targeted therapy.In the thesis,an intracellular delivery system based on film bulk acoustic resonator is built up and studied systematically,which uses hypersonic waves generated by the resonator to interact with cells,making artificial porations on membranes,improving permeability of the membrane,and further enhancing the efficiency of delivery.The film bulk acoustic resonator is a micron-sized resonator,which utilizes piezoelectric/inverse piezoelectric effects to generate bulk acoustic waves and ultimately form acoustic resonance.Owing to the miniaturized size,the high quality factor,and the low cost,the film bulk acoustic resonator is widely used in the applications of both science and industry.Since the intrinsic performance of the resonator can directly determine/influence the quality of the delivery system,the characteristics of the resonator are studied first to garantee the performance of the system,including physical and electric properties,electric modeling,and so on.The main achievements of the study are as follows:1.The modeling of film bulk acoustic resonators is studied systematically by various methods,including electric circuit method,finite element method,and mathmatical matrix method.Through the accurate modeling of the resonator,the performance of the resonator can be optimized,which further guarantees the quanlity of the delivery system.2.The relationship between dispersion characteristics and stack layers is investigated.The dispersion type of the resonator is studied by the mathematical matrix model,which can be modified by fine tuning of the thickness of the top reflection layer,providing a powerful stimulation in the intracellular delivery system.3.Notably,the film bulk acoustic resonator is applied in the field of intracellular delivery.A novel intracellular delivery system based on the film bulk acoustic resonators is built up.The working principle of the system is both theoretically analyzed and experimentally verified.The delivery system is free of chemicals,which simplifies experiment operations,and lowers cost.4.A series of experimental studies of the intracellular delivery system are carried out,including system biocompatibility,deliveries of micromolecular drug,deliveries of macromolecular drug,and so on.The system is miniaturized and is convenient for array treatment,which can improve the throughput and the delivery efficiency of the system.Additionally,the system is a localized delivery system,which opens possibilities for site-targeting delivery in vivo.