The Study And Implementation Of Photonic Crystal Based Nanofluidic Structure

Photonic crystal and nanofluidic structure have already become a hot research topic in the field of biodetection and analysis.Up to date,photonic crystal based biosensors have been extensively developed and applied to label-free detection,fluorescence enhancement detection and related research area.Also,with the characteristics of small volume and high surface to volume ratio,nanofluidic structure has been researched explosively in detection low concentration small molecules,proteins,genes,and DNA.Within this dissertation,the concept of photonic crystal and nanofluidic had been creatively combined,and a novelty concept of photonic crystal based nanofluidic had been proposed.The key modeling issues of photonic crystal based nanofluidic channel structure had been researched thoroughly,and two types of photonic crystal based nanofluidic structures,MEMS process based and nanoreplica molding based,had been implemented.A modeling method for photonic crystal based nanofluidic structure had been realized.The photonic crystal based nanofluidic structure,which worked on the required resonance wavelength,had been designed according to the modeling process.The electromagnetic theory of photonic crystal and the flow principle of nanofluidic had been studied respectively.As a result,the electromagnetic simulation method of photonic crystal based nanofluidic structure and flow ability testing method for nanochannels had been built according to their guided theory.With the resonance wavelength on 532 nm set as the design aim for photonic crystal based nanofluidic structure,all the potential photonic crystal based nanofluidic structures,which met the design requirements,had been obtained.An optimization method of photonic crystal based nanofluidic structure had been designed,and the optimized structure was obtained according to the optimization method.Then,the performance of optimized photonic crystal based nanofluidic structure was assessed with simulation method.The fabrication methods for photonic crystal were analyzed,and MEMS process based photonic crystal based nanofluidic structure had been designed.According to the nanoreplica molding method,the nanoreplica molding based sensor structure was obtained.Electromagnetic simulation was used to evaluate the performance of these two photonic crystal based nanofluidic structures.MEMS process based photonic crystal structure was fabricated,and its related fabrication method was thoroughly studied.The influencing factors for fabricating the photonic crystal structure were analyzed,and the optimized design and fabrication process was given for the fabricated photonic crystal structure.With photolithography,bonding method and related MEMS process,the MEMS process based photonic crystal nanofluidic biosensor was realized.The nanoreplica molding based photonic crystal nanofluidic structure was fabricated,and its related fabrication methods were analyzed in details.The bonding result of biosensor and fluidity of nanochannels were simulated with electromagnetic method.With the fabricated nanoreplica molding based structure,bonding and fluidity were tested on transmission optical setup,and the experimental results were matched with the simulation result.The fluorescence enhancement effect of photonic crystal based nanofluidic structure was studied,and fluorescence enhancement experiments with fabricated structures were achieved.