Research On Integrated Micro Electrical Machining System And Its Applications

With the development of micro electro mechanical system products towards refinement, complication and diversification, the micro fabrication technique is proposed for higher standard. The micro-EDM as a practical technique has absolute advantages in processing tinny dimension parts, such as miropore, micro groove and micro three dimensional structure, however, it is also restricted seriously by some problems. Focus on the problems of single function, worse flexibility and low processing efficiency, this paper developed integrated micro-EDM processing system based on micro-WEDM tool and studied relevant processing crafts using this system.This paper designed integrated micro-EDM process system using WEDM process tool and function module. This system can complete two dimensional structure and three dimensional structure with rotation structure process, such as micro-WEDM, sinker micro-EDM, micro-EDM milling, etc.. This system enhanced the micro-EDM process ability and extended the applied field.Based on analyzing the discharge character of discharge power supply and studying the detecting techniques of discharge states, this paper presented a micro-EDM detection method based on discharge density and designed the software and hardware structure, which improved the detecting resolution of discharge states in micro-EDM processing.Focus on different micro-EDM process, fuzzy controllers were designed differently according to fuzzy control theory. The input variable of fuzzy control system is discharge condition statistical probability, however, the output response are different in micro-WEDM and micro-EDM hole. The output responses are interpulse servo reference voltage and interpulse cutter lifting cycle respectively. Combined VC++and MATLAB, integrated micro-EDM process fuzzy control system was conducted. In this procedure, the regulation and modification of membership function and fuzzy rules can be completed by using Fuzzy Logic Toolbox visually to finish automatic generation of C language code. So that the virtual operation can be completed and algorithm validity can be verified.This paper studied the processing craft of SiCp/Al composite material micro-WEDM. A quadratic regression mathematical model about material removal rate of SiCp/Al composite material micro-WEDM was conducted by using response surface method based on central composite design. Meanwhile, power supply parameters were optimized by using particle swarm optimization. In addition, to obtain tinny surface roughness, multi processing crafts about SiCp/Al composite material micro-WEDM were conducted.It studied online process technology of micro array electrode and holes by micro-WEDM, analyzed the impact of cutting area and wire speed on machining accuracy and the impact of feed speed on processing efficiency and array electrode wear. It completed online process of micro array electrode and holes by micro-WEDM by using reasonable parameter setting in horizontal type processing.This paper studied the rotational structure by micro-WEDM, analyzed the impact of polar effect on processing surface quality. A quadratic regression mathematical model about micro-WEDM material removal rate was completed by using response surface methodology, which used open circuit voltage, discharge capacitance and workpiece revolution speed as variables. And it also analyzed the impact of servo reference voltage on micro-WEDM machining precision.This paper also presented a compound method to process micro turbine rotor die and its technological process. A series of experiments about die fabrication were conducted. The dies were applied in micro extrusion tool to complete the efficient fabrication by using mould mode, which verified the validity and practicability of this integrated micro-EDM system.