Research On Key Technology Of Fine Pointing Micro-Positioning System For Laser Intersatellite Communication Terminal

Micro-positioning system has attracted much attention recently in such application fields as optical engineering, micro-assembly, precision measurement, nano-science, medical science, biology, semiconductor industry and aerospace.As one of the best solutions for future space communication, free space optical communication possesses such advantages as high data rate, large capacity and high secrecy as compared with microwave communication. However, the extremely narrow beam width calls for severe acquisition, pointing and tracking requirements. As a key component of laser beam Acquisition, Pointing,and Tracking(APT) system for free space optical communication, the compact fine pointing steering mirror determines the performance of the communication system.This dissertation is part of a state"863"project. In this dissertation, on the basis of the latest domestic and overseas situation of laser communication and fine pointing micro-positioning technique, the theory and critical techniques are studied systematically and deeply, such as mechanical design of the fine pointing steering mirror, structural stiffness model of the flexible ring, dynamic modeling and model analysis of the fine pointing steering mirror, driving technique, measuring technique and intelligent control method of PZT, etc. The fine pointing micro-positioning experiment systems are built laterFirstly, on the basis of analyzing the principle of APT system,executing APT task by using compound-axis control structure is proposed. By studying cooperation mode of the coarse pointing system and the fine pointing micro-positioning system in different phases, optical open-loop phase and optical closed-loop phase, performance of the fine pointing micro-positioning system and coarse pointing system is acquired.This paper presents a new type structural design of the fine pointing steering mirror– a piezoelectrically-driven micro-positioning deflective mechanism where the tilt movements are implemented by the elastic deformation of flexible rings. It provides fast and precise control in tilt movements around X-axis, Y-axis and piston movement along Z-axis. The mechanism is machined from one solid...