Optical Analysis And Experiments Of MEMS-based Grating Light Modulator For Display Applications

Projection display devices are undergoing a period of muti-development, and with the maturation of MEMS technology, which leads to MEMS-based light modulators for display applications has become one of the research focuses, such as Digital Micromirror Devices, Thin-film Micromirror Array and Grating Light Valve. DMD has entered into the market and as an important branch has promoted the next generation display industry for its merits. But domestic research on these devices is relatively lagged and restricted by international patents, so it is a great importance and potential value to develop a novel MEMS-based light modulator for display applications with independent intellectual property rights.In this paper, two MEMS-based grating light modulators (Reflector Moving Grating Light Modulator and Grating Moving Light Modulator) were proposed, after the review of literature about MEMS-based light modulators in domestic and abroad was summarized. Their theoretical models were developed and validated by scalar diffraction theory. Especially, the influence of structural parameters and manufacture error were in details analyzed and simulated. The 4×4, 2×16 and 16×16 Grating Moving Light Modulator(GMLM) arrays have been manufactured. A non-contact wavelength scanning spectrum analysis method was put forward to measure vertical distance. Diffraction and signal processing experiments were carried on. The main works of this paper are follows:①After summarizing the review of literature about MEMS-based light modulator in domestic and abroad, novel MEMS-based light modulators were put forward.②The display system of grating light modulator was analyzed, which indicates that the grating light modulator is the core part of display system.③The structure of Reflector Moving Grating Light Modulator (RMGLM) was first introduced and optical principle using scalar diffraction theory was in details analyzed and simulated by Coventor software.④The structure of Grating Moving Light Modulator was first put forward. Optical principle of single GMLM pixel and GMLM array, the relationship between important parameters and contrast ratio were analyzed and simulated. The manufacture error was discussed. The geometrical parameters of GMLM were achieved. The methods of using different thickness of grating margin, foursquare electrode, laddering...