Study On The Performance Of Silicon-based Optoelectronic Devices

Silicon photonics has raised intensive interests in recent years, as well as silicon based optical interconnection. Silicon photonics can benefit from sophisticated integrated circuit industry since it is compatible with complementary metal-oxide-semiconductor technology. As an important building block, ultra-speed silicon based modulators are essential due to the demand of optical integration. Thus its chirp characteristics, transmission and speed become main consideration. Along with the development of silicon photonics, application under long-wave infrared wavelength has attached much more attention, either.Combining the theory of silicon photonics, we have analyzed the chirp characteristics, performance of the experimental system, long-wave infrared undercut waveguide application in the following four aspects:1Chirp characteristics of silicon Mach-Zehnder Interferometer modulators with forward-biased PIN and reverse-biased PN structures are investigated by performing small-signal and large-signal simulation, respectively. Simulation result shows that chirp parameter is negative and influenced by the carrier absorption effect, the amplitude, and the frequency of applied signal. Negative chirp is essential to facilitate long-haul and high data rate transmission and able to achieve high quality modulation fro silicon photonic networks on chip.2Chirp characteristics of micro-ring based silicon modulators and ring-assisted MZI modulators are also fully analyzed. The chirp parameter can be tuned by choosing different operation point. A way to achieve zero-chirp is also proposed.3Due to the complexity of coherent detection, experiment setup associated with high-speed silicon modulators are proposed and built. In order to realize ultra-speed modulator, traveling-wave electrodes are designed and utilized during the silicon chip tapeout.4The undercut long-wave infrared waveguide components with air-gap beneath are analyzed and fabricated on the silicon wafer with simple manufacturing process. A1×2MMI splitter based on this structure is presented and measured under the10.6μm wavelength experimental setup. Applications of wireless sensor networks utilizing silicon infrared photonics are put forward at last.The work of this thesis mostly focuses on the device performance analysis, experiment improvement and applications of silicon photonics. The thesis is intended to provide a guidance and reference for the following research of photonics technology.