Research And Experiments Of A Master-Slave Tele-Micromanipulation System With Force-sensing Feedback

The technology of tele-micromanipulation means that the telecontrol technology of robots is extended and applied in micromanipulation field.The tele-micromanipulation with focre sensing feedback makes operators not only take part in the control of micromanipulation,but also perceive the micromanipulation state in time, enhances advantageously the dexterity, security and efficiency, it is kind of central means in complicated micromanipulation , possess wide application outlook in MEMS(Micro-Electro-Mechanical System) field , bioengineering manipulation field , and MIS( Minimally Invasive Surgery ) field nowadays. According to application requirements of micromanipulation /microassembly, the dissertation is carried on research on M-S (master-slave) tele-micromanipulation system and developed , manufactured under the support by the key project(No.59990470) and the project(No.50275078) of National Nature Science Foundation of China, the dissertation consists of the optimizing design technology of the hand-controller as master- hand ,developing and manufacturing technology of the micromanipulator with force sensing ,researching on control technology of tele-micromanipulation and validating by experimentation etc. The maincreativities and achievements of the dissertation are as follows:1) Micro-force senor technology of micromanipulator is researched , two kind micromanupulators—micro-gripper and probe pattern micromanupulator are designed and manufactured, expriments and analyse of the microforce sensing proformance is carried.2) The optimize design technology is studied on a parallel hand-controller based Delta machine using in micromanipulation. First ,the concept and expression method of the force transmission capability of the parallel machine is proposed according as proformance require of hand-controller with force feedback, the distributing of force transmission capability in the workspace is analysed in the case of Delta machine; Base on this ,the multi-objective optimization function is proposed including factor of the stability of force transmission , kinematics proformance and workspace volume, the kinematics analyse , singular analyse and multi-objective optimization design is carried on hand-controller machine ;Furthermore, a kind error compensating method of position is propsed in calibration of hand-controller and ouput precise is enhanced evidently.3) The control technology of tele-micromanipulation with force feedback is stuied .First, based on the micro-gripper with force sensing , the experimentation system of the single degree of freedom tele-micromanipulation with force sensing feedback is developed and manufactured, relized the force sensing feedback , the proformance of position track and feedback force track and characteristic of time lag is analyzed by experments; Secondly, according the control requiring of multi-degree of freedom tele-micromanipulation with force sensing feedback , some studies are carried on telepresence technology, dynamics model ,control scheme and realizing technology .4) Based on the design scheme of system, the M-S tele-micromanipulation systems of three degree freedom and four degree freedom are developed and manufactured , expriments of gravity compensated of hand-controller and tele-micromanipulation with force sensing feedback are carried on , the results of expriments proved the validity of the system and showed the dexterity in micromanipulation by the system..