Fiber Confocal Scanning Microscopic Imaging Technique

Single mode optical fiber laser confocal scanning microscopy is a new technology in microstructure studying. The speciality of the system is limiting the out-of-focus light reflected from out-of-focus plane in object to restrict the blur of image. Therefore, the plane resolution and axial resolution of the system could be improved to sub-micron grade. It was important in studying the surface and layers of microstructure, and has bright prospect especially in the applied domain of biology and microelectronics. On the base of studying imaging theory of lens, the imaging theory of laser confocal scanning microscopy was analyzed in detail in this paper, and the advancement of that the optical fiber was applied to the system was described; on the base of completed the demonstration for whole project, the experiment scheme was designed; the relationship between the main parameters of key devices and the resolution was deduced, and the requirements of coupling efficiency and vignetting effects to optical system was analyzed; the design of optical system and the planar scanning controlling circuit was completed; a new method was put forward to resolved the inherent non-liner scanning problem of the galvanometer scanner by using software liner controlling in circuit design, and the perfect planar scanning was realized; at last the low noise, high multiple and non-distortion amplify circuit of photoelectric detector was completed.