Positioning Control Of Stereo Microscopic Visual Servoing Based On The Micromanipulation System

Many works have dealt with the development of control approaches to automate the different tasks such as positioning, picking, placing and insertion of different micro-objects in the feature sizes of micron and submicron scale are called micromanipulation and micro assembly. The machines who carry out the micromanipulation and microassembly named as microrobotic system. In recently years, the micromanipulation and microassembly are widely applied in MEMS(Micro Electro Mechanical Systems), MOEMS(Micro Opto Electro Mechanical Systems) and Bio MEMS(Biological MEMS). Microrobot control system is combination with microscopic visual information to form the microscopic visual servoing control system, and make the system has the capable of intelligent interaction with the external environment is one of the main directions of micromanipulation system development. At present, the research scope for micromanipulation system has developed from theoretical research to practical application design. The future development of this field lies on the industrial applicability of systems that aims to convert the micromanipulation technique to the huge manufacturing process. In order to achieve this goal, the micro level and qulity of the automation and intelligence of the micromanipulation system will play a significant role in the development process.This paper centered on the automation of micromanipulation system for the overall planning of the system, and the composition and structure of the micromanipulation system are provide and a microrobotic system is constructed, which is mainly composed of an executive module, a microscopic vision module and a control module. On this basis, the imaging model and 3D control of micropositoning of micro stereo microscopic vision system are research.For acquisition of depth information in the microscopic visual servoing system, the imaging model of the CMO(common main objective) type stereo light microscopy(SLM) and the G(Greenough) type stereo light microscopy are used in microscopic vision module have been deduced. The imaging model of two kind structures of light path contains no depth information and the left and right image information are used to obtain the image Jacobian matrix. We can directly obtain visual information from the 3D space without measuring or estimating the depth information of unknown points. Considering the kinematics characteristics of micro positioning table, we design the 3D microscopic visual servoing positioning controller based on the image. Then the stability of the micromanipulation closed-loop system is analysed.For the stability analysis of complex prolem in stereo microscopic system, we decompose the mass matrix and then to establish the model transformation of dynamics equation of the microrobot system. The stereo microscopic system has been to transforrmed as a generalized Hamiltonian system. Then the microscopic visual servoing controller has been designed, and the closed-loop system is asymptotically stably has been analyzed.For the traditional image-based visual servoing control system always using the geometrical characteristics of the objects such as dots, lines, area, etc. as the characteristic value to design the controller, and the classical visual servoing schemes requires the use of image processing problems such as the extraction, matching and tracking algorithms to obtain the features form the image. For these we proposed a scheme for automatic micropositioning of stereo microscopic visual servo control system based on the Phong illumination model and Optical flow technology. We use the whole image intensity information as the characteristic values to implement the micromanipulation operation. Then we design a directly servoing controller based on the image intensity, and using this method, it avoids the characteristic value of extraction, matching and tracking steps in image processing.