| Along with the development of micro / nano-science and technology, the research area has continued to deepen, having expanded the operation area. For completing of a more subtle and sophisticated operation, the accuracy of the movement system has been put a higher standard, especially in biomedical engineering, precision machining, robotics, computer, automation, precision measurement and precision devices micro-fabrication and ultra-precision processing and so on, the micro/nano-precision positioning/driving technology are also in increasing demand,. The research on the precision actuators that based on the different principles and structures attracts more attention of the people.Combinating with the National Natural Science Fund Project "Theoretical and Experimental Reseanch on New Micro Inertia Piezoelectric Impact Drive Mechanism", and basing on the principle of making use of the ordered changes of the surface friction and the inertial force to form the micro-displacement, we developed a new inertia piezoelectric actuator. We have developed the new actuator through theoretic analysis, finite element analysis, tribology analysis and test methods.Taking the inertia piezoelectric impact drive mechanism by changing friction force as the research object, we made use of the ordered orperation of the impact force and friction force to form the movement.According to the tribology, piezoelectricity, dynamics, vibration analysis, and other theoretical knowledge,we explore the priciple of the movement of the impact drive mechanism in theory ,reveal the friction effect of the contact location and the rapid expansion of the piezoelectric element forms,and the influence for the inertia piezoelectric impact drive mechanism. Making the theoretical foundation for the reserch of the inertia piezoelectric impact drive mechanism.According to the above principles in the design of the structure, we developed 3 linear actuators driven by the piezoelectric element and 2 rotatory...
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