Structure Optimization And Performance Analysis Of Axial-magnetized Permanent Magnet Micromotor Based On MEMS Technology

During the miniaturization of the axial-magnetized permanent magnet micromotor, problems of many aspects are studied in this thesis, such as the changes of its torque and efficiency, the minimum motor which can satisfy practical application, the optimum design method of this kind of micromotor, and the optimum batch production processes.The significance of this kind of micromotor is discussed, as well as its status in quo. During its miniaturization, many motors with different structural parameters are simulated, and the effects of main parameters on flux density are analyzed in ANSYS. Then the structural parameters with different diameters are obtained, which can guide the design of the miniaturization of the motor.The torque and efficiency of the motor are calculated and analyzed. A lot of torques with different diameters and the optimum winding density in the stator are obtained. The minimum motor, which is limited by such aspects as structure, torque and flux density together, can produce the torque of 47μN m when given 0.1A current. And it is 10mm in diameter and 4mm in thickness.Stator coils with different sizes are fabricated on PCB, and the relevant parts like rotor, yoke and shaft are got by fine mechanical machining. Then many motors are produced to judge the correctness of simulation results. A lot of knowledge is accumulated, which is good to produce the motor with even smaller line width and space by MEMS technology.The fabrication processes of stator coil are studied and improved. The problems of electroforming high aspect-ratio coil, batch production of stator coils and silicon deep etching process are solved. Reproducibility of the processes has been enhanced. And the completed processes of making high aspect-ratio planar coil are produced...