Study On Miniaturization Of Spectrometer For Biochemical Use

Miniaturization and micromation are now leading an important way for science and technology. The development background and the state of art of micro spectrometers are described in the paper at first. The significance of studying on micro spectrometers is summarized. The necessity of studying on the micro spectrometers is analyzed.For the purpose of biochemical analysis application, a miniaturized multi-channel fiber spectrometer with crossing Czerny-Turner configuration is designed. The crossing Czerny-Tumer structure used by the optical system is analyzed. The ray tracing and aberration analysis of the spectrometer is realized with AutoCAD and OSLO. The quality of spectral images is also evaluated by OSLO to get the optical configuration within aberration limits. A linear CCD is used as the receiving system to realize multi-channel real time spectral analyzing.The prototype of the miniaturized spectrometer has been fabricated and some relative experiments have been carried out. The spectral calibration of the small spectrometer has been completed and resolution, wavelength precision and bandwidth of it are all determined. And the primary factors taking effect on the resolving power of the instrument have been analyzed.The basis of the theory of spectral biochemical analysis is the Lambert Beer law. The Lambert law tells us the relation between the absorption and the length of the liquid layer, but the Beer law can give us the relation between the absorption and the concentration of the solution. The factors influencing the Lambert Beer law are introduced. And the relation between absorption spectra and the spectral bandwidth is analyzed.The purpose of measuring spectral absorption spectral experiments is determined. The makeup of experiment instruments is introduced and the configuration of testing system is performed. The experiments.are divided into two groups: One is for testing the absorption spectra of colorful liquid, the other is for testing the albumin in the blood serum by the method of bromcresol green.On the basis of design and manufacture of the miniaturized spectrometer, we also study on that of micro spectrometer. Silicon grating is a principal dispersing element to fabricate micro spectrometer. The development and application of silicon grating is introduced, especially the use in micro spectrometers. Silicon grating is a period construction fabricated on the silicon wafer by micro fabrication techniques as ultravioletlithography and anisotropic etching. A method to make blazed silicon gratings is designed. The fabrication of (100) and (111) silicon wafer grating is performed by bulk silicon techniques. The surfaces of silicon gratings have been tested by AFM. The results of testing show that the silicon (111) crystal plane is very smoothing by etching method.