SIRI-TOFMS For Ultratrace And Microanalysis

A new apparatus-SIRI-TOFMS(SputterInitiated Resonance Ionization Time-Of-Flight Mass Spectrometer) is described, which will be able to provide innovatory ultratrace and micro analys is technique. The core of the SIRI-TOFMS is resonance ionization spec tr oscopy(RIS )combined with two other technologies, ion beam sputtering and time-of-flight mass spectrometry.The SIRI-TOFMS has not only ultrasensi-tivity and high selectivity,but also can do microanalysis. Par ticularly, because of the presence of little matrix effect,it can overcome the difficulty of calibrationwhich problem cannot be solved by SIMS. Tiie other advantage Is It can be used to detect all elements except lie Hum and neon. So it has a wide rangï¿¡of application for many fields in science and engineering.The design processing installation and preliminary adjustment of the SIrI-TOI'MS has been done. A statistical sensitivity on the order of magnitude of 2.5X10""7 has been achi eved. After further adjusting and improving, the design target, 2X10""10, can be realized.