Research Of Theory And Experiment Of The Atmospheric Surface Glow Discharge

In this paper, the theory and experiment results of Atmospheric Pressure DielectricBarrier Discharge (APDBD) are detailedly introduced, and at the same time, the theoryand experiment method of Dielectric Barrier Discharge (DBD) is summarized. In orderto make the plasma, which is generated by Surface Dielectric Barrier Discharge(SDBD), satisfy the demands of the interaction between the plasma and electromagneticwave, the electric field intensity calculation and numerical simulation and experimentsof SDBD are mainly discussed. The theory results indicate that the efficiency of whichplasma absorbs the electromagnetic wave depends on the thickness of plasma greatlywhen the plasma density is adequacy. Thus the most important aim is that the thicknessof plasma is increased high enough for SDBD at a proper pressure. At First, the two-dimension static electrical field intensity of SDBD is calculated byBoundary Element Method.,then the generator is optimized and designed basing on thecalculated electric field distribution. In the end, the most optimized type andconfiguration paramerer is selected and tested by experiments. From the experimentsresults, the development of plasma generator at atmosphere can be settled by the abovemethod, and the plasma of which can absorb electromagnetic wave will come into beingpossibly. From the electric field intensity distribution, we analyze and deduce the SDBD ofcombed electrodes generator. For the SDBD generator of single-side combed-electrodes,the electric field intensity decreases very rapidly along the normal direction position ofdielectric board, so the luminescence thickness of plasma produced by SDBD is limited.Therefore, the electrodes configuration is adjusted to make the electric field gradssmaller along the normal direction of dielectric board. From the electric field intensitydistribution of improved-type generator and coplanar-type generator, the electric fieldgrads of both types generator along the normal direction position of dielectric board isamended largely. The trapped mechanism is applied to simulate the Atmospheric Pressure SurfaceGlow Discharge (APSGD) which is generated by the combed-electrodes generator. Thenumerical simulation result indicates that the condition of which generated APSGD isthat the AC voltage frequency is 9kHz when the electrodes configuration is determinateand the sinusoidal peak-to-peak applied voltage is about 9kV. When the AC voltagefrequency is about 1MHz, the discharge pattern of SDBD is filament discharge. Thisresults is very important for the development of SDBD. With the numerical simulationresults, the APSGD experiment is carried out. The output voltage of power supply is ACsinusoidal wave. When the sinusoidal peak-to-peak applied voltage is about 9kV and itsfrequency is about 10kHz, the APSGD will appear, and the luminescence thickness of IIplasma is less than 1mm. This experiment result agrees well with the calculated results.Because of the limitation of the power supply output frequency, the experiment can notvalidate the theory result of which the filament discharge will appear when the voltagefrequency is about 1MHz. The improved-type and coplanar-type generators are operated under lower than oneatmosphere pressure. The experiment results indicate that the improved-type generatorproduces thicker luminescence plasma with lower pressure (3kPa). The coplanar-typegenerator can get the 8mm plasma luminescence thickness when the air pressure is30kPa. These experiment results are very important for us to apply the SDBD to studythe interaction between the electromagnetic wave and plasma.