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Keyword [spin-on]
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1.
Based On The Sioc Low-k Dielectric And The Doped Films
2.
Integrated Circuit Interconnecting Medium Sicon Membrane Preparation And Performance Characterization
3.
Preparation And Research Of Ultralow Dielectric Constant Materials On Porous SiCOH Films
4.
Fabrication Of High Performance Germanium Devices Using Spin-on Dopant And Laser Annealing
5.
Study Of Spin-on Doping Of Phosphorous On Ge And Fabrication Of Ge N+/p Shallow Junction
6.
Engineering of silicon and germanium tunnel diodes for integrated circuit application
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