plasma etching - Globe Thesis

Keyword [plasma etching] Result: 41 - 60 \| Page: 3 of 4
41.	Etching A Meter-Scale Resist Grating With Plasma
42.	Simulation And Experimental Verification Of Plasma Etching And Deposition
43.	The Influences Of Hydrogen In ZnO Film Growth And ICP Etching In ZnO Nano-patterning
44.	Research On Atmosphere Plasma Based Horizontal Etching Polishing Of Silicon Wafers
45.	Spectral Image Acquisition Device And Signal Processing Method In Plasma Etching Process
46.	The Simulation Of Plasma Etching Based On Kinetic Monte Carlo Parallel Algorithm
47.	Research On Simulation Model Of Etching Process In Integrated Circuit Manufacturing
48.	Rational design of non-damaging capacitively coupled plasma etching and photoresist stripping processes for ultralow k dielectric materials
49.	Halogen-based plasma etching of novel field-effect transistor gate materials
50.	Control of plasma etching of semiconductor surfaces
51.	Plasma etching of antimonide based III-V semiconductor materials and device structures
52.	High density plasma etching of wide bandgap semiconductor materials for fabricating novel devices
53.	Kinetic Modeling of Halogen-Based Plasma Etching of Complex Oxide Films and its Application to Predictive Feature Profile Simulation
54.	High-density plasma etching of III-nitrides: Process development, device applications and damage remediation
55.	Plasma etching for advanced polymer optical devices
56.	Plasma etching chemistries and reaction mechanisms for patterning high dielectric constant materials on silicon
57.	Advanced plasma etching processes for dielectric materials in VLSI technology
58.	Effects of chamber wall conditions on plasma etching processes
59.	Gallium arsenide backside through chip via hole integration using inductively coupled plasma etching
60.	Surface reaction mechanisms in plasma etching processes
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