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Keyword [near-field lithography]
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1. Optical Characteristics Of Nanoscale Waveguide And Its Application In Near Field Lithography
2. The Methodological Research Of Wavefront Modulation On Improving The Resolution Of Super-resolution Imaging Lithography
3. Modal Analysis Of Nanoscale Bowtie Antenna And Application In Nanolithography
4. Mechanism And Experiment Research On Fabrication Of Large Depth Nanopattern With Rotational Near Field Lithography
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