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Keyword [micromirrors]
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1. Fabrication Of MEMS Optical Switch Reflective Micromirrors And FEM Analysis Of Actuator Structure
2. Research Of MOEMS Scanning Mirror Integrated With Angle Sensor
3. Design and fabrication of SOI-based micromirrors for optical applications
4. Large-scan-range electrothermal MEMS micromirrors and microlenses and their biomedical imaging applications
5. A surface micromachining fabrication process for aluminum MEMS micromirrors
6. Electrically tunable micromirrors and microcavities
7. Dynamics, control and fabrication of micromirrors for maskless lithography
8. Design and fabrication of micromirrors for optical applications
9. MEMS high-quality micromirrors for optical interconnect and optical pick-up heads
10. Integrated passives and resonant inductive coupling as a displacement sensing mechanism for large piston/rotation micromirrors
11. Design Of Lidar Ranging Based On MEMS Micromirrors
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