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Keyword [low-k films]
Result: 1 - 2 | Page: 1 of 1
1.
Investigation On Trench Etching In SiCOH Low-k Films By C
2
F
6
/O
2
/Ar Dual-frequency Capacitively Coupled Plasma
2.
Research On Characteristics Optimization Of Nanoporous Materials Used In Integrated Circuit Copper Interconnect Process
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