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Keyword [low-k film]
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1. Mechanical Characterization For Low-k Film Of ULSI Interconnects By LSAWs
2. Fast Characterization Of The Young's Modulus Of Low-k Film By LSAWs
3. Fast Characterization Of The Young's Modulus Of Low-k Film By Lsaws
4. Back-end A Low-k Materials And Reel Package Reliability Study
5. Study Of Multi-parameters Determination Of Mechanical And Interfacial Properties Of Interconnection Film By SAW
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