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Keyword [low-k dielectric]
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1. SOI Lateral High Voltage Device And Its Breakdown Voltage Model Based On The Enhanced Dielectric Electric Field Principle
2. The Study On The Delay Time For The Interconnection In ULSI
3. A Novel Intergrated Circuit Cu Interconnect Process Research
4. The Study Of Plasma Stripping To Low K Material Damage
5. Atomic Layer Deposition Of Ultra-thin Tin And Al <sub> 2 </ Sub> O <sub> 3 </ Sub> Film Theory And Based On The Mos Device Of Selenium Nanowires
6. Based On The Sioc Low-k Dielectric And The Doped Films
7. .cu / Low-k Dielectric Surface Contact Analysis, Chemical Mechanical Polishing
8. Application Of Supercritical CO2in Photoresist Removal And Low-k Dielectric Repair
9. Research On Novel Copper Contact And The Impacts Of Slurry On Low-k Dielectric
10. Strategies Of RC Delay Reduction In45Nm BEOL Technology
11. Analysis On Defect And Improvement Of Re-liability For QFN Cu Wire Bonding Based On Low K Dielectric Layer
12. Study Of Low-K Dielectric Material And Local Storage Performance In Nano-scaled SONOS Devices
13. The Wafer Cutting Parameters Influence On The Reliability Of The Low K Dielectric Layer
14. Effect Of CMP On Low K Material And Research On Its Optimization Methods
15. Technology Research And Development For 55nm Metal Hard Mask All-in-one Etch Process
16. Assessment of the mechanical integrity of copper/low-k dielectric in a flip chip package
17. Research On The Defects Of 55nm Copper Interconnect Technology
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