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Keyword [low stress]
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1. CMOS Compatible Thermopile Infrared Detector Released By Dry Etching
2. Design And Characteristic Measurement Of A Thermopile Infrared Detector
3. Capacitive MEMS Microphones With A Low-stress Ultra-thin Vibrating Membrane
4. Study On Light Aging And Preparation Of Epoxy Packaging Materials For LED Applications
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