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Keyword [linear motor-driven]
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1. Dyanmic Modeling And Simulation Of The Extreme Ultra Violet Lithography Wafer Stage
2. Friction Coefficient Changed Inchworm-like Robot With The Linear Motor Driven
3. A performance-oriented multi-loop control of systems with constraints and uncertainties
4. Observer based adaptive robust control with application to coordinated precision control of linear motor driven high speed electro-mechanical systems
5. High Precision Control Of Dual-Linear-Motor-Driven Gantry System Based On B-Spline Wavelet Neural Network Approximation
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