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Keyword [inductively coupled plasma reactive ion etching]
Result: 1 - 3 | Page: 1 of 1
1.
Optical Waveguide Devices And Their Anti-reflection Coatings In Silicon-on-Insulator
2.
Simulation And Fabrication Of Optical Waveguide Devices In Silicon-on-Insulator
3.
Optical Waveguide Devices And Improvement Of Their Sidewall Surface Roughness In Silicon-on-Insulator
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