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Keyword [high aspect ratio]
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1. Research On Key Technologies And Related Mechanism Of Electron Beam Lithography In Micro-Nano System
2. Research On Period Reduction Lithography Based On Surface Plasmon Polaritons Interference
3. High-Aspect-Ratio Micro-and Nanostructures:Simulation,Fabrication,and Application
4. Research On Method Of Model-Based Infrared Reflectometry For Micro/Nano Deep Trench Structures
5. Study On High Aspect Ratio LIGA Process
6. Study On Testing Method For Surface Profiling Of MEMS' Devices With Trench Structure
7. Microfabrication Of The High Aspect Ratio Microstructure
8. Research On Fabrication Processes And The Application Of High Aspect Ratio Nanooptics
9. Research On The Key Techniques Of Virtual Probe Based On Standing Wave
10. Experimental Studies On Fabrication Of High-aspect-ratio Microgrooves By Femtosecond Laser Based On Electron Dynamics Control
11. Research On 3-PPSR Parallel Manipulator System With High Aspect Ratio Flexibel Hinges
12. Research Of High-aspect Ratio Holes Drilled By Femtosecond Laser
13. Fabrication Of Micro Inertial Switch And Process Of Thick Positive Photoresist
14. Research On High Aspect Ratio TSV Cleaning Technology Enhanced By Megasonic
15. The Study On Copper Electro-deposition In High Aspect Ratio Through Silicon Vias
16. Slective Epitaxy Of GaN In Deep And Submicron Holes And Lateral Growth On Si Substrate
17. Fabrication Process Of Micro Electrical Switch And Copper Micro Grating
18. Research On The Key Technology For Preparing High Aspect Micro And Nano Structures
19. Optimization Study On The Through Hole Electroplating And White Mist Of High Aspect Ratio Printed Circuit
20. A Flexible Sensor Based On Surface Microstructure
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