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1.
Structure Design And Process Integration Of Wafer Level Vacuum Packaging For MEMS
2.
The Materials Outgassing Properties And Vacuum Life Research Of MILO
3.
Study On The Package Design Of An Uncooled Infrared Focal Plane Array Detector Without Pumping Nozzle
4.
Development Of MEMS Capacitance Vacuum Sensor Based On Non Evaporable Getter Films
5.
An Detection For Internal Getter Or Setter Smell Based On Deep Learningg
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