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Keyword [galvanic corrosion]
Result: 1 - 10 | Page: 1 of 1
1.
Study On Barrier CMP Material And Technology For 65nm And Below IC With Alkaline Slurry
2.
Investigation On Electrochemical Properties Of Novel Barrier Layer Ru Chemical Mechanical Polishing For Great Large Scale Intergration With Multilayer Copper Interconnection
3.
Study On The Galvanic Corrosion In Barrier Chemical Mechanical Planarization Of Great Large Scale Intergration With Copper Wiring
4.
Study On The Optimization Of Barrier Cobalt Chemical Mechanical Planarization
5.
Study On Interface Corrosion Of Barrier Layer Cobalt Chemical Mechanical Polishing For GLSI Multilayer Copper Wiring
6.
Study On BTA Removal Of Post CMP Cleaning Of Noval Barriers For GLSI
7.
Investigation On Interface Corrosion Of Barrier Layer Ru Chemical Mechanical Polishing For GLSI Multilayer Copper Interconnection
8.
Investigation On Cu/Ru Galvanic Corrosion Of Barrier Layer Ru Chemical Mechanical Polishing For GLSI Multilayer Copper Interconnection
9.
Study On Surface Adsorption And Electrochemical Corrosion In Post CMP Cleaning Of Copper
10.
Study On Cmpand Electrochemical Characteristics Of Glsi Multilayer Copper Wiring Co Barrier Layer
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