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Keyword [Wafer level vacuum package]
Result: 1 - 4 | Page: 1 of 1
1.
Study On Capacitive MEMS Accelerometer Fabricated By Four Layers Si-Si Bonding
2.
A Si-Si Bonding Sandwich Accelerometer With Precisely Controllable Capacitor Gap
3.
Research On Technology Of MEMS Wafer Level Vacuum Packaging Based On TGV
4.
The Optimal Design Of The Wafer-Level Vacuum Package Butterfly Vibratory Gyroscope
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