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Keyword [Through-wafer interconnects]
Result: 1 - 3 | Page: 1 of 1
1.
Capacitive micromachined ultrasonic transducers with through-wafer interconnects
2.
Electrical through-wafer interconnects for integrated sensors and actuators
3.
Electrical through-wafer interconnects and microfabricated cantilever arrays using through-wafer silicon etching
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