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Keyword [Through-wafer]
Result: 1 - 9 | Page: 1 of 1
1.
Study On Wafer-level Chip Scale Package For MEMS
2.
Capacitive micromachined ultrasonic transducers with through-wafer interconnects
3.
Developing through-Wafer via (TWV) and Plasma Dicing Process for Silicon Interconnect Fabric (Si-IF
4.
Low-loss on-chip interconnects for silicon integrated radio-frequency and microwave systems
5.
Through wafer 3D Vertical Micro-Coaxial Probe for high frequency material characterization and millimeter wave packaging systems
6.
Electrical through-wafer interconnects for integrated sensors and actuators
7.
Electrical through-wafer interconnects and microfabricated cantilever arrays using through-wafer silicon etching
8.
Through-wafer three-dimensional micromachining and its applications for neural interfaces and microrelays
9.
Through-wafer interrogation of MEMS device motion
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