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Keyword [Thin film bulk acoustic wave]
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1. RF AlN Thin Film Bulk Acoustic Wave Resonators
2. Preparation And Primary Property Study Of Piezoelectric Thin Film Bulk Acoustic Wave Liquid Sensor
3. Study On Stress Loading Effect Of FBAR
4. Research On Evaluation Method For Power Handling Capablity Of Bulk Acoustic Wave Resonator
5. Study On Stress Sensitivity Mechanism Of TE Mode Bulk Acoustic Wave Resonator
6. Fabrication and characterization of AlN thin film bulk acoustic wave resonator
7. MEMS-based system for particle exposure assessment using thin-film bulk acoustic wave resonators and IR/UV optical discrimination
8. Techniques to facilitate the fabrication of zinc oxide-based thin film bulk acoustic wave devices
9. Research And Fabrication Of Ultra-thin Piezoelectric Crystal Resonator
10. The Research On Design And Synthesis Of FBAR Filter
11. Research On Key Technologies Of Shear Wave Mode Thin-film Bulk Acoustic Wave Resonators
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