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Keyword [Surface stress]
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1. Research Of Microcantilever Biochemical Sensing Technique
2. Fundmental Study On Electrochemical Immunosensor Based On Microcantilever
3. Research Of Microcantilever Immunosensor Technique Based On Surface Stress Effect
4. Surface Stress-based MEMS Biosensor
5. Stability Analysis Of Slope Under Complex Stress Conditions Based On MPGA
6. Design,Fabrication And Interferometric Measurement Method Using Dual-grating Of Microbeams For Surface Stress Sensing
7. The Research Of Measuring Method Of Polymer Sheet Surface Internal Stress Based On Ultrasonic Technology
8. Study And Design Of Micro Fabrication And Test Platform Of PGMS Micromembrane Capacitive Biosensor Based On Surface Stress
9. Surface Stress Modulation Structure Applied To Si-based Devices
10. Silicon microcantilevers as sensors
11. Parylene based cantilevers for biosensing
12. Properties of piezoresistive silicon nano-scale cantilevers with applications to BioNEMS
13. Mechanism governing surface stress generatio
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