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Keyword [Silicon micromachining]
Result: 1 - 8 | Page: 1 of 1
1.
Study On Silicon Based MEMS Optical Switch
2.
Anisotropic Wet Etching Of Silicon And Its Application In The Micro-nano Structures
3.
A Micromechanical Optical Switch Based On Bulk Silicon Micromachining Process
4.
Research On The Front-Sided Silicon Bulk Micromachined Micro Flow-Sensor Based On Differential Pressure Sensing Principle
5.
Design of a millimeter wave active antenna module using benzocyclobutene and silicon micromachining
6.
Three dimensional integration and packaging using silicon micromachining
7.
Bulk micromachining of silicon for MOEMS prototype
8.
MEMS design: The geometry of silicon micromachining
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