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Keyword [Silicon micro-resonant pressure sensor]
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1. Core Body Of Silicon Micro-resonant Pressure Sensor Design And Production Process
2. Design And Research Of The Pressure Detecting Elements Inside The MEMS Silicon Micro Resonant Pressure Sensor
3. Research On Control Method Of MEMS Resonant Pressure Sensor
4. Research On Self-Excited Driving Technology Of Silicon Micro Resonant Pressure Sensor
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