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Keyword [SiCN thin films]
Result: 1 - 3 | Page: 1 of 1
1.
Doped With Nitrogen Sic Thin Films And Their Optical Properties
2.
The Research Of SiCN Films Prepared By Magnetron Sputtering
3.
Preparation And Properties Of SiCN Thin Films Deposited By Reactive Magnetron Sputtering
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