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Keyword [Si-Si bonding]
Result: 1 - 3 | Page: 1 of 1
1.
Study On Capacitive MEMS Accelerometer Fabricated By Four Layers Si-Si Bonding
2.
Research On Accelerometer With Double-sided Beam-mass Structure Fabricated By Self-stop Etching
3.
A Si-Si Bonding Sandwich Accelerometer With Precisely Controllable Capacitor Gap
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