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Keyword [Proximity lithography]
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1. Simulation Research Of Exposure And Post Exposure Bake Processes Based On UV-LIGA Photolithography Technology
2. Proximity Ultraviolet Lithography Based On Simulated Annealing Algorithm Of Error Correction
3. Proximity Exposure Graphics Copy Of Computer-aided Analysis And Process Optimization
4. The Simulation Of The Light Intensity Distribution In Optical Lithography Process
5. Gap Detection And Numerical Simulation For Plasmonic Super-resolution Based On Traverse Chirp Grating
6. Design and characterization of a high brightness neutral particle source for proximity lithography
7. Fabrication of annular nanostructures using ion beam proximity lithography
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