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Keyword [PEALD]
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1. Deposition And Interfacial Modulation Of Hf-based Gate Dielectric Film By PEALD
2. Low-temperature Remote Plasma Enhanced Atomic Layer Deposition Of Thin Film Encapsulation For Flexible Organic Light-emitting Diodes
3. Surface Nitrogen Passivation And Physical Characteristics Of GaSb Material
4. Study On Interface Treatment Technique And The Internal Mechanism For AlGaN/GaN MIS-HEMT
5. Plasma-enhanced atomic layer deposition zinc oixde flexible thin film electronics
6. PECVD, spatial ALD, and PEALD zinc oxide thin film transistors
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