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Keyword [Novel high-k]
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1. A novel high-K SONOS type non-volatile memory and NMOS hafnium oxide Vth instability studies for gate electrode and interface treatment effects
2. Deposition of epitaxial silicon/silicon-germanium/germanium and novel high-k gate dielectrics using remote plasma chemical vapor deposition
3. Novel high-k gate dielectric engineering and thermal stability of critical interfaces
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