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Keyword [Microelectromechanical systems]
Result: 21 - 31 | Page: 2 of 2
21.
Polycrystalline silicon germanium for fabrication, release, and packaging of microelectromechanical systems
22.
Integrated Parylene microelectromechanical systems (MEMS)
23.
On the feasibility of integrated optical waveguide-based in situ monitoring of microelectromechanical systems (MEMS)
24.
Fiber-optic beam control systems using microelectromechanical systems (MEMS)
25.
Laser interferometric methodologies for characterizing static and dynamic behavior of microelectromechanical systems (MEMS)
26.
Velocity and displacement measurements of microelectromechanical systems using laser vibrometry
27.
An SOI-based, fully integrated fabrication process for high-aspect-ratio microelectromechanical systems
28.
Strategies for realization of integrated microelectromechanical systems: On-board power, silicon circuitry, multichip modules
29.
Simulation of microelectromechanical systems
30.
Multi-scale Simulation Development and Microscopic Contact Physics in Ohmic RF Microelectromechanical Systems (MEMS) Switches
31.
Development of Deformable Electronics using Microelectromechanical Systems (MEMS) based Fabrication Technologies
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