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Keyword [Micro-Opto-Electro-mechanical System]
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1. Structural Parameter Analysis And Experiment Of MEMS-based Grating Moving Light Modulator
2. Study Of Parameters Of 1×2 MEMS Optical Switch
3. Structure Design And Fabrication Of Micro F-P Cavity Tunable Filter
4. A micro-opto-electro-mechanical system (MOEMS) for microstructure manipulation
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